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Absolute flatness measurements of silicon mirrors by a three-intersection method by near-infrared interferometry

Junichi Uchikoshi, Yoshinori Hayashi, Noritaka Ajari, Kentaro Kawai, Kenta Arima and Mizuho Morita*

Nanoscale Research Letters 2013, 8:275  doi:10.1186/1556-276X-8-275

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1556-276X-8-275