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Profile measurement of concave spherical mirror and a flat mirror using a high-speed nanoprofiler

Koji Usuki*, Takao Kitayama, Hiroki Matsumura, Takuya Kojima, Junichi Uchikoshi, Yasuo Higashi and Katsuyoshi Endo

Nanoscale Research Letters 2013, 8:231  doi:10.1186/1556-276X-8-231

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