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Metal-assisted chemical etching of Ge(100) surfaces in water toward nanoscale patterning

Tatsuya Kawase, Atsushi Mura, Katsuya Dei, Keisuke Nishitani, Kentaro Kawai, Junichi Uchikoshi, Mizuho Morita and Kenta Arima*

Nanoscale Research Letters 2013, 8:151  doi:10.1186/1556-276X-8-151

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1556-276X-8-151