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Discrete distribution of implanted and annealed arsenic atoms in silicon nanowires and its effect on device performance

Masashi Uematsu*, Kohei M Itoh, Gennady Mil'nikov, Hideki Minari and Nobuya Mori

Nanoscale Research Letters 2012, 7:685  doi:10.1186/1556-276X-7-685

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