Open Access Nano Express

Deposition of F-doped ZnO transparent thin films using ZnF2-doped ZnO target under different sputtering substrate temperatures

Fang-Hsing Wang, Cheng-Fu Yang* and Yen-Hsien Lee

Nanoscale Research Letters 2014, 9:97  doi:10.1186/1556-276X-9-97

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