Table 2

Thicknesses estimated by fitting of the spectroscopic ellipsometry measurements of surface-etched Si-QDSLs
Parameters 300°C 400°C 500°C 600°C
MSE 14.94 10.80 14.72 15.90
Ts (nm) 1.9 1.4 2.8 2.1
T (nm) 165.0 172.8 171.2 245.5

Yamada et al.

Yamada et al. Nanoscale Research Letters 2014 9:72   doi:10.1186/1556-276X-9-72

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