Table 1

Thicknesses estimated by fitting of the spectroscopic ellipsometry measurements of Si-QDSLs
Parameters 300°C 400°C 500°C 600°C
MSE 11.56 12.22 13.37 13.30
Ts (nm) 33.1 11.5 15.2 6.5
T (nm) 167.7 212.8 224.7 246.1

Yamada et al.

Yamada et al. Nanoscale Research Letters 2014 9:72   doi:10.1186/1556-276X-9-72

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