Arrhenius plot of diffusion coefficient of hydrogen in Si-QDSLs. The calculated diffusion coefficients of single-crystal silicon by van Wieringen et al.  and the estimated diffusion coefficients of an a-SiC thin film with hydrogen concentration of 0.4 ± 0.1 at.% by Schmidt et al.  are also described.
Yamada et al. Nanoscale Research Letters 2014 9:72 doi:10.1186/1556-276X-9-72