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Maskless micro/nanofabrication on GaAs surface by friction-induced selective etching

Peng Tang, Bingjun Yu, Jian Guo, Chenfei Song and Linmao Qian*

Author Affiliations

Tribology Research Institute, National Traction Power Laboratory, Southwest Jiaotong University, Chengdu 610031, People’s Republic of China

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Nanoscale Research Letters 2014, 9:59  doi:10.1186/1556-276X-9-59

Published: 4 February 2014


In the present study, a friction-induced selective etching method was developed to produce nanostructures on GaAs surface. Without any resist mask, the nanofabrication can be achieved by scratching and post-etching in sulfuric acid solution. The effects of the applied normal load and etching period on the formation of the nanostructure were studied. Results showed that the height of the nanostructure increased with the normal load or the etching period. XPS and Raman detection demonstrated that residual compressive stress and lattice densification were probably the main reason for selective etching, which eventually led to the protrusive nanostructures from the scratched area on the GaAs surface. Through a homemade multi-probe instrument, the capability of this fabrication method was demonstrated by producing various nanostructures on the GaAs surface, such as linear array, intersecting parallel, surface mesas, and special letters. In summary, the proposed method provided a straightforward and more maneuverable micro/nanofabrication method on the GaAs surface.

Maskless; Micro/nanofabrication; GaAs; Friction-induced selective etching