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Compositional and optical properties of SiO x films and (SiO x /SiO y ) junctions deposited by HFCVD

Diana E Vázquez-Valerdi*, Jose A Luna-López*, Jesús Carrillo-López, Godofredo García-Salgado, Alfredo Benítez-Lara and Néstor D Espinosa-Torres

Nanoscale Research Letters 2014, 9:422  doi:10.1186/1556-276X-9-422

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