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Compositional and optical properties of SiOx films and (SiOx/SiOy) junctions deposited by HFCVD

Diana E Vázquez-Valerdi, Jose A Luna-López, Jesús Carrillo-López, Godofredo García-Salgado, Alfredo Benítez-Lara and Nestor D Espinosa-Torres

Nanoscale Research Letters 2014, 9:422  doi:10.1186/1556-276X-9-422


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