SEM images of microparticles. SEM images of microparticles transformed through (a) 6 h annealing and (b) 9 h annealing of a 40-nm-thick Al film and (c) 9 h annealing of a 90-nm-thick Al film on Si substrate. Annealing temperature was set at 550°C. Scale bars 2.5 μm. EDX element analysis results are also presented for the particle area (notated as ‘1’) and the rest (notated as ‘2’), respectively.
Noh Nanoscale Research Letters 2014 9:312 doi:10.1186/1556-276X-9-312