Table 1

Summary of physical parameters of the nc-Si:H thin films prepared under various hydrogen dilution ratios
RH (%) Rd (Å/s) d (nm) XC (%) n CO (at.%) CH (at.%)
97.5 0.2895 8.6 76.83 2.980 5.73 34.19
98.0 0.2583 7.3 75.41 2.768 8.39 33.90
98.2 0.2540 6.3 73.15 2.744 8.80 32.46
98.6 0.1966 5.8 72.07 2.663 10.92 33.98
98.8 0.1830 5.5 74.69 2.650 9.34 33.66
99.2 0.1778 6.1 75.72 2.541 3.33 30.63

Wen et al.

Wen et al. Nanoscale Research Letters 2014 9:303   doi:10.1186/1556-276X-9-303

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