Figure 2.

SEM images of nanopatterned quartz substrates with different nanoscale geometries after direct RIE etching with CF4/CHF3/SF6/Ar/O2 mixing gases. (a) hemisphere nanostructure, (b) hemi-ellipsis nanostructure, and (c) pyramidal pit nanostructure.

Zhu et al. Nanoscale Research Letters 2014 9:25   doi:10.1186/1556-276X-9-25
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