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Surface scattering mechanisms of tantalum nitride thin film resistor

Huey-Ru Chen, Ying-Chung Chen*, Ting-Chang Chang*, Kuan-Chang Chang, Tsung-Ming Tsai, Tian-Jian Chu, Chih-Cheng Shih, Nai-Chuan Chuang and Kao-Yuan Wang

Nanoscale Research Letters 2014, 9:177  doi:10.1186/1556-276X-9-177

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