Figure 5.

The cross-sectional views of irradiated films with different doses. (a) 1 × 1014 ions/cm2, (b) 5 × 1014 ions/cm2, (c) 10 × 1014 ions/cm2, and (d) 50 × 1014 ions/cm2.

Yuan et al. Nanoscale Research Letters 2014 9:173   doi:10.1186/1556-276X-9-173
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