AFM image and profiles. (a) AFM image of 10-nm-thick Ag film deposited at 295 K. The lowest ever reported morphology parameters for e-beam deposition technique are as follows: ten-point height value = 1.05 nm, average height = 0.9 nm, and RMS height = 0.22 nm. AFM profiles of (b) 10- and (c) 30-nm-thick Ag films deposited at 295 K.
Stefaniuk et al. Nanoscale Research Letters 2014 9:153 doi:10.1186/1556-276X-9-153