Figure 1.

Top view SEM images of TiN films deposited at various oblique angles. (a) 0°, (b) 60°, (c) 70°, (d) 80°, (e) 85°, and (f) side view image of (e). Insets show the side view images.

Xie et al. Nanoscale Research Letters 2014 9:105   doi:10.1186/1556-276X-9-105
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