Fabrication of TiN nanostructure as a hydrogen peroxide sensor by oblique angle deposition
1 State Key Laboratory of New Ceramics and Fine Processing, School of Materials Science and Engineering, Tsinghua University, Beijing 100084, China
2 High-Tech Institute of Xi’an, Xi’an, Shannxi 710025, China
3 Key Laboratory of Advanced Materials (MOE), School of Materials Science and Engineering, Tsinghua University, Beijing 100084, China
Nanoscale Research Letters 2014, 9:105 doi:10.1186/1556-276X-9-105Published: 4 March 2014
Nanostructured titanium nitride (TiN) films with varying porosity were prepared by the oblique angle deposition technique (OAD). The porosity of films increases as the deposition angle becomes larger. The film obtained at an incident angle of 85° exhibits the best catalytic activity and sensitivity to hydrogen peroxide (H2O2). This could be attributed to its largest contact area with the electrolyte. An effective approach is thus proposed to fabricate TiN nanostructure as H2O2 sensor by OAD.