Figure 5.

Grids with wire diameters at the nanoscale. (a) Grid pattern generated in a 144-nm-thick SiOx film using a laser wavelength of 248 nm and a fluence of 300 mJ/cm2. (b) Grid pattern generated in a 28-nm-thick SiOx film using a laser wavelength of 193 nm and a fluence of 130 mJ/cm2.

Ihlemann and Weichenhain-Schriever Nanoscale Research Letters 2014 9:102   doi:10.1186/1556-276X-9-102
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