Table 1

Comparison between ERDA and IR H concentration in a sample hydrogenated at 1.5 ml/min
Annealing time (h) H (at.%)
ERDA IR IR
(A = 1.4 × 1020)[[23,24]] (A = 9.1 × 1019)[[1]]
   0 17.5 20.4 13.3
   1 10.9 14.9 9.55
   4 9.9 12.8 8.20

Comparison between ERDA and IR hydrogen concentration in a-Si single layers hydrogenated at 1.5 ml/min as a function of annealing time at 350°C. IR concentrations are calculated with two different A values (cm−2). See text.

Serényi et al.

Serényi et al. Nanoscale Research Letters 2013 8:84   doi:10.1186/1556-276X-8-84

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