Figure 5.

SEM images of ALD Pt on Al2O3 as a function of deposition cycles. (a) 40, (b) 60, (c) 70, and (d) 90 cycles. Substrate temperature, 300°C; pulse time of (MeCp)Pt(Me)3, 1 s.

Ding et al. Nanoscale Research Letters 2013 8:80   doi:10.1186/1556-276X-8-80
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