Figure 4.

SEM images of ALD Pt on Al2O3 for different pulse times of (MeCp)Pt(Me)3. (a) 0.25, (b) 0.5, (c) 1, and (d) 2 s (substrate temperature 300°C, deposition cycles 70).

Ding et al. Nanoscale Research Letters 2013 8:80   doi:10.1186/1556-276X-8-80
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