Open Access Nano Express

Atomic layer deposition of high-density Pt nanodots on Al2O3 film using (MeCp)Pt(Me)3 and O2 precursors for nonvolatile memory applications

Shi-Jin Ding*, Hong-Bing Chen, Xing-Mei Cui, Sun Chen, Qing-Qing Sun, Peng Zhou, Hong-Liang Lu, David Wei Zhang and Chen Shen

Nanoscale Research Letters 2013, 8:80  doi:10.1186/1556-276X-8-80

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