Figure 1.

Schematic of the PA-ALD process. (1) H2O, (2) TMA, (3) Ar gas cylinder, (4) precursor control valve, (5) Ar control valve, (6) check valve, (7) isolator, (8) electrode, (9) substrate, (10) reactor, (11) pressure gauge, (12) needle valve, and (13) vacuum pump.

Edy et al. Nanoscale Research Letters 2013 8:79   doi:10.1186/1556-276X-8-79
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