Influence of argon plasma on the deposition of Al2O3 film onto the PET surfaces by atomic layer deposition

Nano Express

Influence of argon plasma on the deposition of Al₂O₃ film onto the PET surfaces by atomic layer deposition

Riyanto Edy, Xiaojiang Huang, Ying Guo, Jing Zhang and Jianjun Shi^*

Nanoscale Research Letters 2013, 8:79 doi:10.1186/1556-276X-8-79

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