Open Access Nano Express

Influence of argon plasma on the deposition of Al2O3 film onto the PET surfaces by atomic layer deposition

Riyanto Edy, Xiaojiang Huang, Ying Guo, Jing Zhang and Jianjun Shi*

Nanoscale Research Letters 2013, 8:79  doi:10.1186/1556-276X-8-79

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