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Oxidative and carbonaceous patterning of Si surface in an organic media by scanning probe lithography

Matteo Lorenzoni1*, Andrea Giugni2 and Bruno Torre1

1 Nanophysics, Istituto Italiano di Tecnologia, Via Morego 30, 16163, Genova, Italy

2 Nanostructures, Istituto Italiano di Tecnologia, Via Morego 30, 16163, Genova, Italy

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Nanoscale Research Letters 2013, 8:75 doi:10.1186/1556-276X-8-75

Published: 13 February 2013

Additional files

Additional file 1:

Oxidative and carbonaceous patterning of Si surface in an organic media by scanning probe lithography. The file contains experimental details (Figures S1 and S2) and supplementary examples of fabrication capabilities (Figures S3 to S5).

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