Table 1
|
| Ag ion implantation parameters for all samples |
| Sample |
Fluence of ion implantation (ions/cm2) |
Energy of ion implantation (kV) |
| S1 |
5 × 1016 |
20 |
| S2 |
5 × 1016 |
40 |
| S3 |
1 × 1017 |
40 |
| S4 |
5 × 1016 |
60 |
Xu et al. Nanoscale Research Letters 2013 8:73 doi:10.1186/1556-276X-8-73