SpringerOpen Newsletter

Receive periodic news and updates relating to SpringerOpen.

Download references

Open Access

Si nanopatterning by reactive ion etching through an on-chip self-assembled porous anodic alumina mask

Violetta Gianneta, Antonis Olziersky and Androula G Nassiopoulou*

Nanoscale Research Letters 2013, 8:71  doi:10.1186/1556-276X-8-71

Include


Format