Nano Express

Si nanopatterning by reactive ion etching through an on-chip self-assembled porous anodic alumina mask

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Violetta Gianneta, Antonis Olziersky and Androula G Nassiopoulou^*

* Corresponding author: Androula G Nassiopoulou A.Nassiopoulou@imel.demokritos.gr

Nanoscale Research Letters 2013, 8:71 doi:10.1186/1556-276X-8-71

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