Open Access Nano Express

Si nanopatterning by reactive ion etching through an on-chip self-assembled porous anodic alumina mask

Violetta Gianneta, Antonis Olziersky and Androula G Nassiopoulou*

Nanoscale Research Letters 2013, 8:71  doi:10.1186/1556-276X-8-71

Accesses  

  • Last 30 days: 51 accesses
  • Last 365 days: 811 accesses
  • All time: 1096 accesses