Table 1

Parameters of the CVD process and physical properties of the obtained PyC film
CH4/H2ratio Press. (mBar) Thickness (nm) Roughness Ra(nm) Optical transmittance at a wavelength of 550 nm Sheet resistance averaged over ten different samples
75:20 31 25.2 ± 0.8 1.07 37% [8] 200 Ω/sq [8]

Kuzhir et al.

Kuzhir et al. Nanoscale Research Letters 2013 8:60   doi:10.1186/1556-276X-8-60

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