Experimental results vs. Ansoft Maxwell simulation. (a, c) The Fele(+25 V) and Fele(−25 V) distribution along the X-axis (0.25-μm spacing from 10 to 15 μm) and the Z-axis. (b, d) The results of Ansoft Maxwell simulation of electrostatic field distribution under Vapp = +25 and −25 V, respectively.
Chang et al. Nanoscale Research Letters 2013 8:519 doi:10.1186/1556-276X-8-519