TEM images of the cross-point memories using Cu electrode. (a) TEM image of a Cu/GeOx/W cross-point memory. HRTEM image with scale bars of (b) 0.2 μm and (c) 5 nm. Films deposited layer by layer are clearly observed by HRTEM imaging.
Rahaman and Maikap Nanoscale Research Letters 2013 8:509 doi:10.1186/1556-276X-8-509