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Versatile pattern generation of periodic, high aspect ratio Si nanostructure arrays with sub-50-nm resolution on a wafer scale

Jian-Wei Ho*, Qixun Wee, Jarrett Dumond, Andrew Tay and Soo-Jin Chua*

Nanoscale Research Letters 2013, 8:506  doi:10.1186/1556-276X-8-506