SEM images of etched surface of glass substrates. SEM images of etched surface of glass substrates after dry etching in RIE for 3 min with RF power of (A) 150, (B) 100, (C) 75, and (D) 50 W, respectively. The insets show the magnified images. Scale bars of main figures and insets correspond to 5 μm and 300 nm, respectively.
Song et al. Nanoscale Research Letters 2013 8:505 doi:10.1186/1556-276X-8-505