Etching rate dependence on the surface area of the holes. The etching rate is dependent on the surface area of the holes and it is increasing strongly for small structures. For very large structures, the etching rate converges to an independent value, which is eight times higher than for the smallest investigated structures.
Mayer et al. Nanoscale Research Letters 2013 8:504 doi:10.1186/1556-276X-8-504