Fabrication scheme of Au-coated VSNEA and corresponding SEM images. (a to i) SEM images tilted by 30o. (a, f) Vertical Si NWs grown on a (111) Si substrate; (b, g) Si NW array coated with a first SiO2 passivation layer; (c, h) Si NW array after coating with an Au electrode; (d, i) Si NW electrode array coated with a second SiO2 passivation layer. (e) Cross-sectional scheme of VSNEA.
Kim et al. Nanoscale Research Letters 2013 8:502 doi:10.1186/1556-276X-8-502