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Open Access Nano Express

Highly uniform hole spacing micro brushes based on aligned carbon nanotube arrays

Zhi Yang1, Xingzhong Zhu1, Xiaolu Huang1, Yingwu Cheng1, Yun Liu1, Huijuan Geng1, Yue Wu2, Yanjie Su1, Hao Wei1* and Yafei Zhang1*

Author Affiliations

1 Key Laboratory for Thin Film and Microfabrication of Ministry of Education, Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, Shanghai 200240, People's Republic of China

2 School of Materials Science and Engineering, Shanghai Jiao Tong University, Shanghai 200240, People's Republic of China

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Nanoscale Research Letters 2013, 8:501  doi:10.1186/1556-276X-8-501

Published: 25 November 2013

Abstract

Highly uniform hole spacing micro brushes were fabricated based on aligned carbon nanotube (CNT) arrays synthesized by chemical vapor deposition method with the assistance of anodic aluminum oxide (AAO) template. Different micro brushes from CNT arrays were constructed on silicon, glass, and polyimide substrates, respectively. The micro brushes had highly uniform hole spacing originating from the regularly periodic pore structure of AAO template. The CNT arrays, serving as bristles, were firmly grafted on the substrates. The brushes can easily clean particles with scale of micrometer on the surface of silicon wafer and from the narrow spaces between the electrodes in a series of cleaning experiments. The results show the potential application of the CNT micro brushes as a cleaning tool in microelectronics manufacture field.

Keywords:
Micro brushes; Carbon nanotube arrays; Chemical vapor deposition