Figure 3.

SEM images of the Si3N4 micropores with different diameters in Si-Si3N4 hybrid structures. (a) 0.47 μm, (b) 0.88 μm, (c) 1.5 μm and (d) 2.0 μm.

Liu et al. Nanoscale Research Letters 2013 8:498   doi:10.1186/1556-276X-8-498
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