Figure 3.

SEM images of the morphology of PDMS soft mold molding. From the quartz master (a), patterned AMONIL-MMS4 (b), and patterned Al thin films obtained by the UV-NIL and RIE (c).

Cui et al. Nanoscale Research Letters 2013 8:472   doi:10.1186/1556-276X-8-472
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