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Large-scale fabrication of nanopatterned sapphire substrates by annealing of patterned Al thin films by soft UV-nanoimprint lithography

Lin Cui*, Jie-Cai Han, Gui-Gen Wang*, Hua-Yu Zhang, Rui Sun and Ling-Hua Li

Nanoscale Research Letters 2013, 8:472  doi:10.1186/1556-276X-8-472