Analysis of the crystallization behavior of P-doped Si-NCs/SiNxfilms. (a) Raman spectra of P-doped Si-NCs/SiNx films with various Rc values. (b) Average Si-NC size of the Si-NCs/SiNx film as a function of the Rc value obtained by XRD data with the Scherrer equation.
Wu et al. Nanoscale Research Letters 2013 8:457 doi:10.1186/1556-276X-8-457