Figure 1.

XPS analysis of P-doped Si-NCs/SiNxfilms. (a) Si and P concentrations in P-doped Si-NCs/SiNx films as a function of the Rc value. (b) Deconvolution analysis of a representative Si 2p XPS spectrum of the P-doped Si-NCs/SiNx sample with Rc = 0.79. (c) XPS peak intensity ratios of ISi-Si/(ISi-Si + ISi-N) and IP-P/(ISi-P + IP-P) of P-doped Si-NCs/SiNx films as a function of the Rc value. (d) Deconvolution analysis of a representative P 2p XPS spectrum of the P-doped Si-NCs/SiNx sample with Rc = 0.79.

Wu et al. Nanoscale Research Letters 2013 8:457   doi:10.1186/1556-276X-8-457
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