EDXS and micro-Raman spectrum of TaNxdeposited on Si. (a) EDXS spectrum. The presence of nitrogen verifies the formation of a-TaN, and the concentration of oxygen is lower than the detection limit (few wt. %). (b) Raman spectrum of TaNx on Si. The broad peaks indicate the amorphous character of the film.
Spyropoulos-Antonakakis et al. Nanoscale Research Letters 2013 8:432 doi:10.1186/1556-276X-8-432