Experimental RBS spectrum (points) and simulated curve using SIMNRA (solid line) for as-deposited film. Inset table is the chemical composition of the film. Inset figure is the refractive index evolution versus TA. The pure HfO2 and pure SiO2 indices are also shown in dashed lines. The films are about 170 nm in thickness.
An et al. Nanoscale Research Letters 2013 8:43 doi:10.1186/1556-276X-8-43