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Structure deformation of indium oxide from nanoparticles into nanostructured polycrystalline films by in situ thermal radiation treatment

Su Kong Chong1, Siti Nur Azieani Azizan1, Kee Wah Chan1, Hong-Quan Nguyen2, Wee Siong Chiu1, Zarina Aspanut1, Chang Fu Dee3 and Saadah Abdul Rahman1*

Author Affiliations

1 Low Dimensional Materials Research Centre, Department of Physics, University of Malaya, Kuala Lumpur 50603, Malaysia

2 Department of Materials Science and Engineering, National Chiao Tung University, Hsinchu 30010, Taiwan

3 Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia (UKM), Bangi, Selangor 43600, Malaysia

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Nanoscale Research Letters 2013, 8:428  doi:10.1186/1556-276X-8-428

Published: 17 October 2013


A microstructure deformation of indium oxide (In2O3) nanoparticles by an in situ thermal radiation treatment in nitrous oxide plasma was investigated. The In2O3 nanoparticles were completely transformed into nanostructured In2O3 films upon 10 min of treatment time. The treated In2O3 nanoparticle sample showed improvement in crystallinity while maintaining a large surface area of nanostructure morphology. The direct transition optical absorption at higher photon energy and the electrical conductivity of the In2O3 nanoparticles were significantly enhanced by the treatment.

Indium oxide; Nanoparticles; Structure deformation; Optical; Electrical