Cross-sectional HRTEM images of TiN/SiNx and TiAlN/SiNx nanocomposite films. (a) Low magnification, (b) medium magnification, (d) high magnification for TiN/SiNx nanocomposite film (Si/Ti = 4:21), and (c) low magnification, (e) high magnification for TiAlN/SiNx nanocomposite film (Si/Ti0.7Al0.3 = 3:22). The SiNx interfacial phase is observed to exist as crystallized state, rather than amorphous state, such as E zone between A and C crystals, F zone between A and B crystals, H zone between B and D crystals, and G zone between C and D crystals.
Li et al. Nanoscale Research Letters 2013 8:427 doi:10.1186/1556-276X-8-427