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Open Access Nano Express

New understanding of hardening mechanism of TiN/SiNx-based nanocomposite films

Wei Li*, Ping Liu, Yongsheng Zhao, Fengcang Ma, Xinkuan Liu, Xiaohong Chen and Daihua He

Nanoscale Research Letters 2013, 8:427  doi:10.1186/1556-276X-8-427

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