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Open Access Nano Express

Microstructure and optical properties of Ag/ITO/Ag multilayer films

Zhaoqi Sun*, Maocui Zhang, Qiping Xia, Gang He and Xueping Song

Author affiliations

School of Physics & Materials Science, Anhui University, Hefei 230601, People’s Republic of China

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Citation and License

Nanoscale Research Letters 2013, 8:424  doi:10.1186/1556-276X-8-424

Published: 17 October 2013


Transflective and highly conductive Ag/ITO/Ag multilayer films were prepared by magnetron sputtering on glass substrates. The microstructure and optical properties of Ag/ITO/Ag multilayer films were systematically investigated by X-ray diffraction, scanning electron microscopy, and ultraviolet-visible spectroscopy. The optical properties of the multilayer films were significantly influenced by the thickness of the Ag surface layer from 3.0 to 12.6 nm. The multilayer film of Ag9.3nm/ITO142nm/Ag9.3nm shows the best comprehensive property. It could satisfy the requirement for transflective LCD.

Ag/ITO/Ag multilayer films; Microstructure; Optical properties