Microstructure and optical properties of Ag/ITO/Ag multilayer films
School of Physics & Materials Science, Anhui University, Hefei 230601, People’s Republic of China
Nanoscale Research Letters 2013, 8:424 doi:10.1186/1556-276X-8-424Published: 17 October 2013
Transflective and highly conductive Ag/ITO/Ag multilayer films were prepared by magnetron sputtering on glass substrates. The microstructure and optical properties of Ag/ITO/Ag multilayer films were systematically investigated by X-ray diffraction, scanning electron microscopy, and ultraviolet-visible spectroscopy. The optical properties of the multilayer films were significantly influenced by the thickness of the Ag surface layer from 3.0 to 12.6 nm. The multilayer film of Ag9.3nm/ITO142nm/Ag9.3nm shows the best comprehensive property. It could satisfy the requirement for transflective LCD.